DWDM grating fabrication
DWDM grating fabrication
The HLS Model PC2 uses holographic, or interference, lithography and provides the means to generate gratings in indium phosphide-based materials with a pitch range from 193 to 260 nm over a 60-mm-diameter area. The system uses an argon-ion laser operating at 457.9 nm. The system incorporates "dial-in pitch selectivity" to allow rapid pattern selection and changes, according to the manufacturer. Pattern pitch is selected using software and is calibrated to a resolution of 0.2 nm.
Holographic Lithography Systems Inc.
Bedford, MA