Automated CMM measures critical dimensions for optoelectronics

8 April 2003 San Jose, CA Lightwave--href=http://www.micro-metric.com>Micro-Metric Inc. recently released the FiberLine high-precision programmable optical Coordinate Measurement Machine (CMM) that automatically measures critical dimensions in the manufacture of multi-fiber terminators, v-grooves, ferrules, optical disks, image sensors, and other optoelectronics devices.

Critical dimensions measured include wafer line widths, component positioning, and optical fiber alignment with feature sizes as small as 0.5 μ m. The system provides field-of-view (FOV) measurement accuracy to 0.01 micron (10-nm), and point-to-point XYZ measurement repeatability to 0.01 micron (10-nm) at 1 sigma (with 100X objective). X, Y, and Z-axis positioning components and system structural components are manufactured from cast iron and granite to achieve the greatest possible accuracy and precision.

Application programs included with the FiberLine are written using Micro-Metric's text-based Measurement Control Language (MCL). Program files are easy to read and allow users to modify existing programs or create their own programs to control the system's operation. The system's image analysis and user-interface software are also written by Micro-Metric, so the company can provide a high level of customer support.